JPH01110258U - - Google Patents
Info
- Publication number
- JPH01110258U JPH01110258U JP629988U JP629988U JPH01110258U JP H01110258 U JPH01110258 U JP H01110258U JP 629988 U JP629988 U JP 629988U JP 629988 U JP629988 U JP 629988U JP H01110258 U JPH01110258 U JP H01110258U
- Authority
- JP
- Japan
- Prior art keywords
- glass disk
- bottom groove
- disk
- circular opening
- pallet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011521 glass Substances 0.000 claims description 7
- 239000010409 thin film Substances 0.000 claims description 2
- 229910010293 ceramic material Inorganic materials 0.000 claims 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP629988U JPH01110258U (en]) | 1988-01-21 | 1988-01-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP629988U JPH01110258U (en]) | 1988-01-21 | 1988-01-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01110258U true JPH01110258U (en]) | 1989-07-25 |
Family
ID=31210402
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP629988U Pending JPH01110258U (en]) | 1988-01-21 | 1988-01-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01110258U (en]) |
-
1988
- 1988-01-21 JP JP629988U patent/JPH01110258U/ja active Pending